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7.2.2 Stacked Capacitor DRAM Cell
Will Directed Self-Assembly Pattern 14nm DRAM?
BALD Engineering - Born in Finland, Born to ALD: Applied Materials
DRAM Tutorial - online presentation
Ultra high resolution SEM observation of DRAM capacitors - ST Instruments
Novel 4F2 DRAM cell with Vertical Pillar Transistor(VPT) - Semantic Scholar
7.2.2 Stacked Capacitor DRAM Cell
Process Window Optimization of DRAM by Virtual Fabrication - Coventor